ABRS系列空气轴承精密直驱转台 | ABRS Air-Bearing Direct-Drive Rotary Stage | ABRS系列精密气浮直驱转台

ABRS系列空气轴承精密直驱转台 | ABRS Air-Bearing Direct-Drive Rotary Stage | ABRS系列精密气浮直驱转台

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2024-09-17 07:41:11
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北京艾玛特科技有限公司

北京艾玛特科技有限公司

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产品简介

Aerotech 的 ABRS 系列旋转空气轴承平台提供的角度定位,速度稳定性和低运动误差性能在一个非常低矮的封装结构中。ABRS旨在满足晶片检查,高精度计量,X射线衍射系统,光学检查和制造,以及微机电系统/纳米器件的制造等应用的严苛要求。

详细介绍

Aerotech ABRS系列空气轴承精密直驱转台提供出色的角度定位,速度稳定性和运动性能,并且拥有非常低矮的外形。


● 直驱无刷无槽伺服电机
● 非机械接触
● 零齿槽效应电机带来显著的速度稳定性
● 显著的无抖动运动特性
● 直接耦合的高精度编码器
● 扁平设计的低矮外形
● 直径:128.1-278.1 mm
● 分辨率: 0.036-0.18 arc-sec
● 双向重复性:< 1 arc-sec
● 定位精度:±2 arc-sec


紧凑封装
The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing "stack-up" related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.


优异的机械设计
The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.


无刷直驱
To maximize positioning performance, the ABRS series utilizes Aerotech s S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque ripple-free. This makes ABRS stages ideal for applications requiring smooth scan velocities at low or high speeds.


精确定位
An optical encoder is standard with the ABRS. When coupled with Aerotech s feedback multipliers and controls, resolutions of <0.03 arc second are achievable.


定制化设计
Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.

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