● 双向重复性达75纳米
● 超精密运动所需要的直接驱动直线电机
● 高精度非接触式玻璃尺的线性编码器
● 平滑运动所需要的抗笼蠕变交叉滚子轴承
● 小尺寸机构展现出色性能
● 平滑运动所需的直线伺服电机

直线电机驱动
Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or "stiction" that is normally associated with a lead screw or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

出众的分辨率
For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demａnd with a resolution of 0.5 nm when coupled with Aerotech controls.

The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provide excellent in-position stability.

优异的几何特性
Aerotech ultra-stiff construction and compact two-piece design result in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±1 μm over the entire travel.

平滑行程
Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.

长寿命设计
Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

精确校准
ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.