品牌
代理商厂商性质
北京市所在地
ABRT-400空气轴承精密直驱转台 | ABRT-400 Air-Bearing Direct-Drive Rotary Stage | ABRT-400精密气浮直驱转台
面议ABRS系列空气轴承精密直驱转台 | ABRS Air-Bearing Direct-Drive Rotary Stage | ABRS系列精密气浮直驱转台
面议ARA1000空气轴承精密直驱转台 | ARA1000 Air-Bearing Direct-Drive Rotary Stage | ARA1000精密气浮转台
面议ABRT系列空气轴承精密直驱转台 | ABRT Air-Bearing Direct-Drive Rotary Stage | ABRT精密气浮转台
面议ADRH机械轴承精密直驱转台 | ADRH Mechanical-Bearing Direct-Drive Rotary Stage
面议ASR1000机械轴承精密直驱转台 | ASR1000 Mechanical-Bearing Direct-Drive Rotary Stage
面议ASR1100机械轴承精密直驱转台 | ASR1100 Mechanical-Bearing Direct-Drive Rotary Stage
面议ASR1200机械轴承精密直驱转台 | ASR1200 Mechanical-Bearing Direct-Drive Rotary Stage
面议CCS 机械轴承精密直驱转台 | CCS Mechanical-Bearing Direct-Drive Rotary Stage
面议ACS 机械轴承精密直驱转台 | ACS Mechanical-Bearing Direct-Drive Rotary Stage
面议ACS LP 机械轴承精密直驱转台 | ACS LP Mechanical-Bearing Direct-Drive Rotary Stage
面议ASRT 机械轴承精密直驱转台 | ASRT Mechanical-Bearing Direct-Drive Rotary Stage | ASRT 防灰尘防水密封转台
面议Patent Pending X-Y Planar Motion System:
ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometer resolution over large volumes. The ALIO team took a new approach to the next generation of equipment needed for the FPD and metrology markets. Larger glass for Gen 7, 8 and beyond in FPB the issues of maintaining high volume and high yields during process and inspection the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors. The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design.
The X-Y Planar system has an application dependant platen for open center or vacuum wafer chuck mounting.