品牌
代理商厂商性质
所在地
1.抽速从 1200-2300 l/s 的全系列产品
2.安装角度可选 0°-90° 和 90°-180°
3.分子泵有抗腐蚀性气体型号可选(C型号)
4.带节流阀和阀门的集成净化气体系统
5.电压范围 90 - 265 V
6.获得 SEMI S2, UL, CSA 和 TÜV认证
7.防护等级 IP54 符合工业环境应用要求
8.适用于各种严苛工艺如刻蚀, 溅镀, 分子泵耐粉尘
9.集成分子泵控制器 TC 1200, 可直接连接一般电源
订货号：
Flange | ISO-K | ISO-F | CF-F | ISO-K | ISO-F | CF-F |
Orientation of the HV flange | up (0° – 90°) | upside down (90° – 180°) | ||||
Pump type | HiPace® 1200, DN 200, TC 1200 | |||||
Standard version | PMP03910 | PMP03911 | PMP03912 | PMP03913 | PMP03914 | PMP03915 |
Corrosive gas version | PMP03916 | PMP03917 | PMP04190 | PMP03918 | PMP03919 | PMP04191 |
Pump type | HiPace® 1500, DN 250, TC 1200 | |||||
Standard version | PMP04060 | PMP04061 | PMP04062 | PMP04063 | PMP04064 | PMP04065 |
Corrosive gas version | PMP04066 | PMP04067 | PMP04192 | PMP04068 | PMP04069 | PMP04193 |
Pump type | HiPace® 1800, DN 200, TC 1200 | |||||
Standard version | PMP04070 | PMP04071 | – | PMP04073 | PMP04074 | – |
Corrosive gas version | PMP04076 | PMP04077 | – | PMP04078 | PMP04079 | – |
Pump type | HiPace® 2300, DN 250, TC 1200 | |||||
Standard version | PMP03920 | PMP03921 | PMP03922 | PMP03923 | PMP03924 | PMP03925 |
Corrosive gas version | PMP03926 | PMP03927 | PMP04194 | PMP03928 | PMP03929 | PMP04195 |
