Orion 1000多功能卷绕镀膜设备-东莞爱加真空科技有限公司手机版

详细介绍

Orion 1000多功能卷绕镀膜设备

System Summary

Orion 1000 series roll to roll vacuum deposition platform is designed for volume manufacturing of flexible substrate from 500mm to 1800mm in size. Vacuum isolated wind and unwind compartments allow the deposition chamber to remain under vacuum during roll changes reducing idle time. Active web steering and precision temperature controlled drum enable high precision films for the most difficult processes including mult layer films.

System Type

Roll to Roll with temperature controlled drum
Front cantilevered roll loading
Vacuum isolated wind / unwind and process chambers
Interleaf web material options available

Optimized Coating Area

500mm – 1000mm wide flexible substrates
Maximum roll diameter 900mm
Configurable core sizes available

Technical Summary

Designed for coating single or multi layer thin film structures on flexible substrates the Orion series enables volume production or pilot production on flexible materials up to 1800 mm wide. Precision web tension, steering including the removal and or addition of interleaf materials under vacuum can accommodate a range of high or low tension materials from stainless steel to thin poly substrates with no wrinkle or deformation.

Coating Method Options

Rotatable or Planar Magnetron Sputter Cathodes
Standard Power Options– RF, Pulsed DC, DC, AC and HIPIMS
PECVD, Ion Source
Thermal evaporation, e-beam, ion-beam etc.
36” – 60” temperature controlled drum. Drum size and deposition source method will dictate the number of deposition source positions available.

Typical System Dimensions

Width - 6.M
Depth - 10.2M
Height – 8.2M

Typical Applications

Thin Film Solar / Battery or Flexible Electronics
Touch Screen film on glass
AR/Low E - Window Films