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主要特性与技术指标
直流和时间相关测量可让您对电流-电压(IV)测量结果充满信心
4 象限电源和测量功能可让您在低至 fA(毫微微安培)的范围内进行精确的电流-电压(IV)表征
测量范围是 0.1 fA - 1 A / 0.5 µV - 200 V
提供点测量、扫描测量、脉冲和采样测量功能
采样测量间隔为 100 μs
脉宽最小值为 500 μs,使用 2 μs 分辨率
准静态电容-电压(QS-CV)测量,具有泄露电流补偿
描述
在低至次 fA / µV 分辨率上执行低电流/电压测量,实现的直流测量性能
电源/测量单元(SMU)是 Keysight B1500A 半导体器件分析仪的关键测量模块。SMU 集成了电压/电流源和测量功能,可在低至 fA / µV 分辨率上执行精确的直流电流-电压(IV)测量。选件 ASU(自动传感和开关单元)可将低电流测量性能向下扩展至次 fA 范围,为您提供更高的测量性能。
SMU 还可执行准静态电容-电压(QS-CV)测量。它不仅拥有低频 CV 特征,同时还是表征栅极晶体管的表面态以及高频 CV 的重要测量方法。Keysight B1500A 支持精确的 QS-CV 测量和泄露电流补偿。
对于要求进行精密电压/电流测量的半导体、纳米器件(例如碳纳米管(CNT)和碳纳米线(CNW))、有源/无源元件、材料以及任意电气器件,SMU 结合使用 EasyEXPERT 软件的分析和数据管理能力,非常适合对这些器件进行表征。
Main features and technical indicators
Dc and time - dependent measurements give you confidence in current - voltage (IV) measurements
The 4 quadrant power supply and measurement capabilities allow you to perform accurate current-voltage (IV) characterization in a range as low as fA (nanoampere)
The measurement range is 0.1 fa-1 A / 0.5 v-200 V
Provides point measurement, scan measurement, pulse and sampling measurement functions
The minimum sampling interval is 100 s
The minimum pulse width is 500 s, using 2 s resolution
Quasi-static capacitance - voltage (QS-CV) measurement with leakage current compensation
describe
Perform low current/voltage measurements at as low as sub-fa/V resolution for optimal dc measurement performance
Power/measurement unit (SMU) is the key measurement module of Keysight B1500A semiconductor device analyzer. SMU integrates a voltage/current source and measurement function to perform accurate dc current-voltage (IV) measurements at a resolution as low as fA/V. Optional ASU (automatic sensing and switching unit) can extend the low current measurement performance down to the sub-fa range, providing you with higher measurement performance.
SMU can also perform quasi-static capacitance-voltage (qs-cv) measurements. It not only has the characteristics of low-frequency CV, but also is an important measurement method to characterize the surface state of gate transistor and high-frequency CV. Keysight B1500A supports accurate QS-CV measurements and leakage current compensation.
For semiconductors, nanodevices (such as CNT and CNW), active/passive components, materials, and any electrical device requiring precise voltage/current measurements, SMU, combined with the analytical and data management capabilities of EasyEXPERT software, is well suited for characterization of these devices.