详细介绍

正置金相显微镜BX53M产品介绍：

*系统化

LED照明

BX53M反射和反射/透射观察机架

机架组合	图号	可用于反射光	可用于透射光	样品高度
BX53MRF-S	1	yes	no	0-65 mm
BX53MTRF-S	2	yes	yes	0-35 mm
BX53MRF-S + BX3M-ARMAD	1、3	yes	no	40-105 mm
BX53MTRF-S + BX3M-ARMAD	2、3	yes	yes	40-75 mm

显微镜支架

镜筒

		FN	类型	角度类型	图像	屈光度调节装置数
1	U-BI30-2	22	双目	固定式	倒像	1
2	U-TBI-3	22	双目	倾斜式	倒像	1
3	U-TR30-2	22	三目	固定式	倒像	1
	U-TR30IR	22	IR用三目	固定式	倒像	2
	U-ETR-4	22	三目	固定式	正像	2
	U-TTR-2	22	三目	倾斜式	倒像	2
	U-SWTR-3	26.5	三目	固定式	倒像	2
	U-SWETTR-5	26.5	三目	倾斜式	正像	2
	U-TLU	22	单口镜筒	—	—	—
	U-TLUIR	22	IR用单口镜筒	—	—	—

照明器

		编码功能	光源	BF	DF	DIC	POL	IR	FL	混合A	AS/FS
1	BX3M-RLAS-S	3个固定式分光镜组件位置	LED-内置	yes	yes	yes	yes			yes	yes
2	BX3M-URAS-S	4个可换装的分光镜组件位置	LED	yes	yes	yes	yes			yes	yes
			卤素灯	yes	yes	yes	yes	yes		yes	yes
			汞灯/光导	yes	yes	yes	yes		yes	yes	yes
3	BX3M-RLA-S		LED	yes	yes	yes	yes			yes	yes
3	BX3M-RLA-S		卤素灯	yes	yes	yes	yes	yes		yes	yes
4	BX3M-KMA-S		LED-内置	yes		yes	yes			yes
5	BX3-ARM	透射光观察专用镜臂
6	U-KMAS		LED	yes		yes	yes			yes
6	U-KMAS		卤素灯	yes		yes	yes	yes		yes

光源

物镜转换器

物镜和滑块的附件。选择所需的物镜数量和类型；以及是否带滑块附件。

滑块

选择DIC滑块来补充常规的明场观察。采用DIC滑块后，在获取有关样品的形貌信息时，可以选择高对比度型或高分辨率型。MIX组合式照明使用起来非常灵活，它在暗场光路中提供了分区的LED光源。

BX53M IR观察

物镜	放大倍率	NA(数值孔径)	WD（mm）	盖玻片厚度（mm）	硅厚度（mm）	分辨率(um)(孔径光阑全开)
LMPLN-IR	5X	0.1	23	0~0.17	_	6.71
LMPLN-IR	10X	0.3	18	0~0.17	_	2.24
LCPLN-IR （适合FN22，不适合FN26.5）	20X	0.45	8.3	0~1.2	0~1.2	1.49(使用1100mm波长)
	50X	0.65	4.5	0~1.2	0~1.2	1.03(使用1100mm波长)
	100X	0.85	1.2	0~0.07	0~1.0	0.79（使用1100mm波长）

	无校正环物镜观察效果			有校正环物镜观察效果

BX53M偏光观察

BXFM系统

正置金相显微镜BX53M基本参数：

SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR GENERAL USE

			Entry		Standard		Advanced
Optical system			UIS2 optical system (infinity-corrected)
Main unit	Microscope frame		BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)
	Focus		Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle
	Max. specimen height		Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD)
	Observation tube	Wide field (F.N.22)	U-TR30-2-2 Inverted: trinocular
	Illumination	Reflected light Transmitted light	BX3M-KMA-S White LED, BF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking		BX3M-RLAS-S Coded, White LED, BF/DF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking
			－	BX3M-LEDT White LED Abbe/long working distance condensers	－	BX3M-LEDT White LED Abbe/long working distance condensers	－	BX3M-LEDT White LED Abbe/long working distance condensers
	Revolving nosepiece		U-5RE-2 For BF: Quintuple		U-D6BDRE For BF/DF: Sextuple			U-D6BDRES-S For BF/DF : Sextuple, Coded
	Eyepiece（F.N.22)		WHN10 WHN10X-H
	MIX observation		－					BX3M-CB Control box BX3M-HS Hａnd switch U-MIXR MIX slider for reflected light observation U-MIXRCBL Cable for MIXR
	Condenser (Long working distance)		－	U-LWCD	－	U-LWCD	－	U-LWCD
	Power cable		UYCP (x1)					UYCP (x2)
	Weight		Reflected: approx.15.8 kg (microscope frame 7.4 kg) Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg)
Objectives	MPLFLN set		MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation		－
	MPLFLN BD set		－		MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation
	MPLFLN-BD, LMPLFLN-BD set		－		MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation
Stage (X x Y)	76 mm x 52 mm set		U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment
	100 mm x 10 0mm set		U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis
	100 mm x 100 (G) mm set		U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate)
	150 mm x 100 mm set		U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis
	150 mm x 100 (G) mm set		U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate)
Option	MIX observation set*		BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL				－
	DIC*		U-DICR
	Intermediate Tubes		U-CA, U-EPA2, U-TRU-1-2, U-TRU
	Filters		U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR
	Filter for condenser		43IF550-W45, U-POT
	Stage plate		U-D6BDRES-S, U-D6RE-ESD-2, U-D6BDRES-ESD, U-5RES-ESD
	Specimen holder		U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4
	Handle rubber		U-SHG, U-SHGT

_{*Cannot be used with U-5RE-2.}

BX53M / BXFM ESD UNITS

Items	Microscope frame	BX53MRF-S, BX53MTRF-S
	Illuminator	BX3M-KMA-S, BX3M-RLA-S, BX3M-URAS-S, BX3M-RLAS-S
	Nosepiece	U-D6BDRES-S, U-D6RE-ESD, U-D5BDREMC-ESD, U-5RES-ESD
	Stage	U-SIC4R2, U-SIC4L2, U-MSSP4

SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR DEDICATED USE

				Fluorescence		Infrared	Polarized
Optical system				UIS2 optical system (infinity-corrected)
Main unit	Microscope frame			BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/ Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)
	Focus			Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle
	Max. specimen height			Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD)
	Observation tube	Wide field (F.N.22)		U-TR30-2 Inverted: trinocular		U-TR30IR Inverted: trinocular for IR	U-TR30-2 Inverted: trinocular
		Polarized Light Intermediate Attachment (U-CPA)	Bertrａnd Lens	－		－	Focusable
			Bertrａnd Field Stop	－		－	ø3.4 mm diameter (fixed)
			Engage or disengage Bertrａnd lens changeover between orthoscopic and conoscopic observation	－		－	Position of slider ● in Position of slider ○ out
			Analyzer Slot	－		－	Rotatable Analyzer with Slot (U-AN360P-2)
	Illumination	Reflected light	FL observation	BX3M-URAS-S Coded, 100 W mercury lamp, 4 position mirror unit turret, (standard: WB, WG, WU+BF etc) With FS, AS (with centering mechanism), With shutter mechanism		－	－
			IR observation	－		BX3M-RLA-S 100W halogen lamp for IR, BF/IR, AS (with centering mechanism) U-LH100IR (Including 12V 10W HAL-L) 100W Halogen light source for IR TH4-100 100W power supply TH4-HS Hａnd switch U-RMT Extension cord	－
		Transmitted light	POL observation	－		－	BX3M-LEDT White LED Abbe/long working distance condensers
	Revolving nosepiece			U-D6BDRES-S For BF/DF : Sextuple, Coded		U-5RE-2 For BF : Quintuple	U-P4RE Quadruple, centerable attachable components 1/4 wavelength retardation plate (U-TAD), tint plate (U-TP530) and various compensators can be attached using plate adapter (U-TAD)
	Eyepiece（F.N.22)			WHN10X
				WHN10X-H			CROSS-WHN10X
	Mirror units			U-FDF For BF, detectable ND filter U-FBFL For BF, built-in ND filter U-FWUS For Ultra Violet-FL U-FWBS For Blue-FL U-FWGS For Green-FL		－
	Filter / Polarizer / Analyzer			U-25FR Frost filter		U-BP1100IR/U-BP1200IR Bａnd path filters for IR	43IF550-W45 Green filter
				U-POIR Reflected polarizer slider for IR		U-AN360IR Rotatable analyzer slider for IR	U-AN360P-2 360° Dial-rotatable Rotatable minimum angle 0.1°
	Condenser			U-LWCD Long working distance		－	U-POC-2 Achromat strain-free condenser. 360°rotatable polarizer with swing-out achromatic top-lens. Click stop at position "0°" is adjustable. NA 0.9 (top-lens in) / NA 0.18 (top-lens out) Aperture iris diaphragm: adjustable from 2 mm to 21 mm diameters
	Slider / Compensators			－			U-TAD Slider (Plate adapter)
							U-TP530 / U-TP137 Compensators
	Power cable			UYCP (x1)		UYCP (x2)	UYCP (x1)
	Weight			Reflected: approx.15.8 kg (microscope frame 7.4 kg)	Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg)	Approx.18.9 kg (microscope frame 7.4 kg)	Approx.16.2 kg (microscope frame 7.6 kg)
Reflected FL light source	Light guide			U-HGLGPS, U-LLGAD, U-LLG150, SHI-130OL Light guide set		－	－
	Mercury lamp			U-LH100HGAPO1-7, USH-103OL (x2), U-RFL-T, U-RCV Mercury lamp set		－	－
Objectives	MPLFLN set			MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation		－	－
	MPLFLN BD set			MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation		－	－
	MPLFLN-BD, LMPLFLN-BD set			MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation		－	－
	IR set			－		LMPLN5XIR,10XIR,LCPLN20XIR,50XIR,100XIR IR observation	－
	POL set			－		－	UPLFLN4XP,10XP,20XP,40XP POL observation
Stage (X x Y)	76 mm x 52 mm set			U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment
	100 mm x 10 0mm set			U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis
	100 mm x 100 (G) mm set			U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate)
	150 mm x 100 mm set			U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis
	150 mm x 100 (G) mm set			U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate)
	POL set			－			I-SRP-1-2+U-FMP Polarizing rotatable stage + Mechanical stage
Option	MIX observation set*			BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL
	DIC*			U-DICR
	Intermediate Tubes			U-CA, U-EPA2, U-TRU-1-2, U-TRU
	Filters			U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR
	Filter for condenser			43IF550-W45, U-POT
	Stage plate			U-WHP64, BH2-WHR43, BH2-WHR54, BH2-WHR65, U-WHP2, BH2-WHR43
	Specimen holder			U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4
	Handle rubber			U-SHG, U-SHGT

_{*Cannot be used with U-5RE-2}

正置金相显微镜BX53M产品应用：


暗场观察表面贴装基板：DF 暗场能够观察标本上的散射或衍射光。任何不平整的部位都会反射这种光，而平整的部位则显得很暗，因此缺陷部位就会清晰地显示出来。用户甚至可以识别出极细微的划痕，或小到8nm级别的缺陷 – 比光学显微镜的分辨能力还要小。因此，暗场是检测标本上细微划痕或缺陷，以及镜面标本（包括晶圆）的理想工具。	微分干涉观察球墨铸铁检测：DIC 微分干涉是一种显微镜观察技术，这种技术把明场观察所不能检测到的标本高度差，变为浮雕状或三维图像，改善了图像衬度。该技术使用了偏光，并有三种专门定制设计的棱镜可以选择。它是检查具有极细微高度差的标本的理想工具，包括金相组织、矿石、磁头、硬盘介质和抛光晶圆表面。

荧光观察半导体晶圆上的颗粒异物：FL 该技术用于通过专用滤色片激发块照明，使标本能够发出荧光（发出不同波长的光），特定的激发块可用于特定的应用。它适合于检查半导体晶圆上的异物、光阻残留物，以及通过荧光染料检测裂缝。可以选配复消色差集光镜系统的灯箱，以补偿从可见光到近红外光的色差。	红外光观察电极切片：IR IR观察是非破坏性地检查可以透过红外光的硅材料或玻璃材料构成的电子元器件内部的方法。

透射光观察LCD彩色滤光片：TLBF+HDR 对于透明样品，比如LCD、塑料和玻璃材料，可以使用各种聚光镜进行透射光观察。组建一个光学系统，实现透射光明场和偏光进行样品检查非常方便。