5863E: Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5863E elastomer sealed analog mass flow meter accuray measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

布鲁克斯模型5863E弹性体密封的模拟质量流量计精确测量气体流量10 - 100 SLPM。布鲁克斯的极其稳定的流量传感器提供可靠，可重复和精确的流量测量，即使在不同的工艺条件。输出为0 - 5 VDC。