| 活动范围 | 300mm x 300mm |
| 测量范围 | 100?~ 35?(Depends on Film Type) |
| 光斑尺寸 | 40?/20?,4?(option) |
| 测量速度 | 1~2 sec./site (fitting time) |
| 应用领域 | All Capability of ST2000 & More Precision Measurement
Intended for Large Size Wafer Measure |
| 选择 | Reference sample(K-MAC or KRISS or NIST)
Anti-vibration table |
| 接物镜转换器 | Quintuple Revolving Nosepiecs |
| 焦点 | Coaxial Coarse and Fine Focus Controls |
| 附带照明 | 12v 100W Halogen Lamp |
